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@ARTICLE{Selvadurai:171929,
      author       = {Selvadurai, Ursula and Tillmann, Wolfgang and Fischer,
                      Gottfried and Sprute, Tobias},
      title        = {{T}he {I}nfluence of {M}ultilayer {D}esign on {R}esidual
                      {S}tress {G}radients in {T}i/{T}i{A}l{N} {S}ystems},
      volume       = {768-769},
      issn         = {1662-9752},
      address      = {Uetikon},
      publisher    = {Trans Tech Publ.},
      reportid     = {PUBDB-2014-03435},
      year         = {2013},
      comment      = {Materials Science Forum},
      booktitle     = {Materials Science Forum},
      abstract     = {In this research work, Ti/TiAlN multilayers of various
                      designs were deposited onsubstrates pretreated by nitriding
                      and etching procedures. The influence of the multilayer
                      design onresidual stress depth profiles was systematically
                      analyzed for multilayers with different Titaniuminterlayer
                      thicknesses. The depth-dependency of stress was measured by
                      a modified sin2ψ method,using various defined gracing
                      incident angles and measuring angles that ensure constant
                      penetrationdepths. The residual stresses were investigated
                      by synchrotron X-ray diffraction (SXRD) at theHASYLAB at
                      DESY in Hamburg, Germany. SXRD allows a phase specific
                      stress evaluation of theceramic and metallic layers of the
                      multilayer systems and the adjacent substrate region.This
                      investigation reveals an influence of the Ti layer thickness
                      on the values and the slope of theresidual stress profile in
                      ceramic TiAlN layers.},
      month         = {Oct},
      date          = {2012-10-07},
      organization  = {The 9th International Conference on
                       Residual Stresses ,
                       Garmisch-Partenkirchen (Germany), 7 Oct
                       2012 - 9 Oct 2012},
      cin          = {DOOR},
      ddc          = {670},
      cid          = {I:(DE-H253)HAS-User-20120731},
      pnm          = {DORIS Beamline G3 (POF2-54G13)},
      pid          = {G:(DE-H253)POF2-G3-20130405},
      experiment   = {EXP:(DE-H253)D-G3-20150101},
      typ          = {PUB:(DE-HGF)36 / PUB:(DE-HGF)7},
      UT           = {WOS:00},
      doi          = {10.4028/www.scientific.net/MSF.768-769.264},
      url          = {https://bib-pubdb1.desy.de/record/171929},
}