TY  - JOUR
AU  - Selvadurai, Ursula
AU  - Tillmann, Wolfgang
AU  - Fischer, Gottfried
AU  - Sprute, Tobias
TI  - The Influence of Multilayer Design on Residual Stress Gradients in Ti/TiAlN Systems
VL  - 768-769
SN  - 1662-9752
CY  - Uetikon
PB  - Trans Tech Publ.
M1  - PUBDB-2014-03435
PY  - 2013
AB  - In this research work, Ti/TiAlN multilayers of various designs were deposited onsubstrates pretreated by nitriding and etching procedures. The influence of the multilayer design onresidual stress depth profiles was systematically analyzed for multilayers with different Titaniuminterlayer thicknesses. The depth-dependency of stress was measured by a modified sin2ψ method,using various defined gracing incident angles and measuring angles that ensure constant penetrationdepths. The residual stresses were investigated by synchrotron X-ray diffraction (SXRD) at theHASYLAB at DESY in Hamburg, Germany. SXRD allows a phase specific stress evaluation of theceramic and metallic layers of the multilayer systems and the adjacent substrate region.This investigation reveals an influence of the Ti layer thickness on the values and the slope of theresidual stress profile in ceramic TiAlN layers.
T2  - The 9th International Conference on Residual Stresses 
CY  - 7 Oct 2012 - 9 Oct 2012, Garmisch-Partenkirchen (Germany)
Y2  - 7 Oct 2012 - 9 Oct 2012
M2  - Garmisch-Partenkirchen, Germany
LB  - PUB:(DE-HGF)36 ; PUB:(DE-HGF)7
UR  - <Go to ISI:>//WOS:00
DO  - DOI:10.4028/www.scientific.net/MSF.768-769.264
UR  - https://bib-pubdb1.desy.de/record/171929
ER  -