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@ARTICLE{Perumal:168934,
author = {Perumal, Karthick and Braun, Wolfgang and Riechert, Henning
and Calarco, Raffaella},
title = {{G}rowth control of epitaxial
$\mathrm{{G}e{T}e–{S}b_2{T}e_3}$ films using a
line-of-sight quadrupole mass spectrometer},
journal = {Journal of crystal growth},
volume = {396},
issn = {0022-0248},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {DESY-2014-02740},
pages = {50 - 53},
year = {2014},
abstract = {A narrow growth window combined with highly temperature
dependent compositional variations poses a serious problem
for the growth of epitaxial GeTe–Sb2Te3 (GST) thin films.
The problems are further aggravated by the weak coupling of
the radiatively heated non-contact thermocouples to the
substrate. An increase in surface temperature during growth
as inferred from the increase in desorption of GeTe
heteromolecules and the resulting change in alloy
composition are studied. Using the desorption signal as a
feedback to control the surface temperature, the
thermocouple temperature was varied over the duration of the
growth to maintain a constant desorption and hence constant
surface temperature. Interestingly, the composition of the
grown films varies along the GeTe–Sb2Te3 pseudobinary line
just by varying the desorption without changing the supplied
flux. The out-of-plane lattice constant of the epitaxially
grown GST thin film increases with an increase in Ge
concentration},
cin = {FS-PE},
ddc = {540},
cid = {I:(DE-H253)FS-PE-20120731},
pnm = {54G - BESSY II (POF2-54G12) / FS Beamline without reference
(POF2-544)},
pid = {G:(DE-HGF)POF2-54G12 / G:(DE-H253)POF2-No-Ref-20130405},
experiment = {EXP:(DE-H253)Unknown-BL-20150101},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000335905400008},
doi = {10.1016/j.jcrysgro.2014.03.039},
url = {https://bib-pubdb1.desy.de/record/168934},
}