TY  - JOUR
AU  - Perumal, Karthick
AU  - Braun, Wolfgang
AU  - Riechert, Henning
AU  - Calarco, Raffaella
TI  - Growth control of epitaxial GeTe–Sb<sub>2</sub>Te<sub>3</sub> films using a line-of-sight quadrupole mass spectrometer
JO  - Journal of crystal growth
VL  - 396
SN  - 0022-0248
CY  - Amsterdam [u.a.]
PB  - Elsevier
M1  - DESY-2014-02740
SP  - 50 - 53
PY  - 2014
AB  - A narrow growth window combined with highly temperature dependent compositional variations poses a serious problem for the growth of epitaxial GeTe–Sb2Te3 (GST) thin films. The problems are further aggravated by the weak coupling of the radiatively heated non-contact thermocouples to the substrate. An increase in surface temperature during growth as inferred from the increase in desorption of GeTe heteromolecules and the resulting change in alloy composition are studied. Using the desorption signal as a feedback to control the surface temperature, the thermocouple temperature was varied over the duration of the growth to maintain a constant desorption and hence constant surface temperature. Interestingly, the composition of the grown films varies along the GeTe–Sb2Te3 pseudobinary line just by varying the desorption without changing the supplied flux. The out-of-plane lattice constant of the epitaxially grown GST thin film increases with an increase in Ge concentration
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000335905400008
DO  - DOI:10.1016/j.jcrysgro.2014.03.039
UR  - https://bib-pubdb1.desy.de/record/168934
ER  -