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@INPROCEEDINGS{Wierzchowski:141031,
      author       = {Wierzchowski, W. and Turos, A. and Wieteska, K. and
                      Stonert, A. and Ratajczak, R. and Jozwik, P. and Wilhelm, R.
                      and Akhamadaliev, S. and Mazur, K. and Paulman, C. and DESY},
      title        = {{I}on implantation of the 4{H} {S}i{C} homoepitaxial layers
                      and substrates with 2 {M}e{V} {S}e and 1 {M}e{V} {A}l ions},
      reportid     = {PHPPUBDB-25261},
      year         = {2012},
      month         = {Jun},
      date          = {2012-06-25},
      organization  = {9th International Conference Ion
                       implantation and other applications of
                       ions and electrons, Kazimierz Dolny
                       (Poland), 25 Jun 2012 - 28 Jun 2012},
      cin          = {HASYLAB(-2012)},
      cid          = {$I:(DE-H253)HASYLAB_-2012_-20130307$},
      pnm          = {DORIS Beamline E2 (POF2-54G13) / DORIS Beamline F1
                      (POF2-54G13) / FS-Proposal: II-20100001 EC (II-20100001-EC)},
      pid          = {G:(DE-H253)POF2-E2-20130405 / G:(DE-H253)POF2-F1-20130405 /
                      G:(DE-H253)II-20100001-EC},
      experiment   = {EXP:(DE-H253)D-F1-20150101 / EXP:(DE-H253)D-E2-20150101},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://bib-pubdb1.desy.de/record/141031},
}