TY  - CONF
AU  - Wierzchowski, W.
AU  - Turos, A.
AU  - Wieteska, K.
AU  - Stonert, A.
AU  - Ratajczak, R.
AU  - Jozwik, P.
AU  - Wilhelm, R.
AU  - Akhamadaliev, S.
AU  - Mazur, K.
AU  - Paulman, C.
AU  - DESY
TI  - Ion implantation of the 4H SiC homoepitaxial layers and substrates with 2 MeV Se and 1 MeV Al ions
M1  - PHPPUBDB-25261
PY  - 2012
T2  - 9th International Conference Ion implantation and other applications of ions and electrons
CY  - 25 Jun 2012 - 28 Jun 2012, Kazimierz Dolny (Poland)
Y2  - 25 Jun 2012 - 28 Jun 2012
M2  - Kazimierz Dolny, Poland
LB  - PUB:(DE-HGF)6
UR  - https://bib-pubdb1.desy.de/record/141031
ER  -