%0 Conference Paper
%A Wierzchowski, W.
%A Turos, A.
%A Wieteska, K.
%A Stonert, A.
%A Ratajczak, R.
%A Jozwik, P.
%A Wilhelm, R.
%A Akhamadaliev, S.
%A Mazur, K.
%A Paulman, C.
%A DESY
%T Ion implantation of the 4H SiC homoepitaxial layers and substrates with 2 MeV Se and 1 MeV Al ions
%M PHPPUBDB-25261
%D 2012
%B 9th International Conference Ion implantation and other applications of ions and electrons
%C 25 Jun 2012 - 28 Jun 2012, Kazimierz Dolny (Poland)
Y2 25 Jun 2012 - 28 Jun 2012
M2 Kazimierz Dolny, Poland
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://bib-pubdb1.desy.de/record/141031