TY  - JOUR
AU  - Wierzchowski, W.
AU  - Wieteska, K.
AU  - Mazur, K.
AU  - Kosciewicz, K.
AU  - Balcer, T.
AU  - Strupinski, W.
AU  - Paulmann, C.
AU  - DESY
TI  - Topographic and Reflectometric Investigation of Crystallographic Defects and Surface Roughness in 4H Silicon Carbide Homoepitaxial Layers Deposited at Various Growth Rates
JO  - Acta physica Polonica / A
VL  - 121
IS  - 4
SN  - 0587-4246
CY  - Warsaw
PB  - Acad. Inst.
M1  - PHPPUBDB-23963
SP  - 915-919
PY  - 2012
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:00
DO  - DOI:10.12693/APhysPolA.121.915
UR  - https://bib-pubdb1.desy.de/record/139091
ER  -