%0 Journal Article
%A Wierzchowski, W.
%A Wieteska, K.
%A Mazur, K.
%A Kosciewicz, K.
%A Balcer, T.
%A Strupinski, W.
%A Paulmann, C.
%A DESY
%T Topographic and Reflectometric Investigation of Crystallographic Defects and Surface Roughness in 4H Silicon Carbide Homoepitaxial Layers Deposited at Various Growth Rates
%J Acta physica Polonica / A
%V 121
%N 4
%@ 0587-4246
%C Warsaw
%I Acad. Inst.
%M PHPPUBDB-23963
%P 915-919
%D 2012
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:00
%R 10.12693/APhysPolA.121.915
%U https://bib-pubdb1.desy.de/record/139091