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| 001 | 79274 | ||
| 005 | 20250731153328.0 | ||
| 024 | 7 | _ | |a 0268-1242 |2 ISSN |
| 024 | 7 | _ | |a 1361-6641 |2 ISSN |
| 024 | 7 | _ | |a 10.1088/0268-1242/22/1/S50 |2 doi |
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| 100 | 1 | _ | |a Rehman-Khan, A. |
| 110 | 1 | _ | |a DESY |b Experiments with synchrotron radiation |
| 245 | _ | _ | |a Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique |
| 260 | _ | _ | |a Bristol |c 2006 |b IOP Publ. |
| 300 | _ | _ | |a 1-4 |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a article |2 DRIVER |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 440 | _ | 0 | |a Semicond. Sci. Technol. |0 PERI:(DE-600)1361285-2 |v 21 |x 0268-1242 |
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| 700 | 1 | _ | |a Stangl, J. |
| 700 | 1 | _ | |a Bauer, G. |
| 700 | 1 | _ | |a Buca, D. |
| 700 | 1 | _ | |a Hollander, B. |
| 700 | 1 | _ | |a Trinkaus, H. |
| 700 | 1 | _ | |a Mantl, S. |
| 700 | 1 | _ | |a Loo, R. |
| 700 | 1 | _ | |a Caymax, M. |
| 773 | _ | _ | |a 10.1088/0268-1242/22/1/S50 |g Vol. 22, p. 1-4 |0 PERI:(DE-600)1361285-2 |q 22<1-4 |p 1-4 |t Semiconductor science and technology |v 22 |y 2006 |x 0268-1242 |
| 856 | 4 | 0 | |u http://www.iop.org/EJ/abstract/0268-1242/22/1/S50/ |
| 856 | 4 | _ | |u https://bib-pubdb1.desy.de/record/79274/files/Aaliya_ISTDM_final.doc |y OpenAccess |
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| 914 | 1 | _ | |a Copyright (c) Institute of Physics and IOP Publishing Limited 2007 |y 2006 |
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