%0 Journal Article
%A Zhang, Songge
%A Zhang, Tao
%A Yu, Hua
%A Li, Tong
%A Li, Xiuzhen
%A Cui, Chenyang
%A Zhou, Yuchao
%A Guo, Hailing
%A Wang, Shuopei
%A Zheng, Dongfeng
%A Huang, Liangfeng
%A Bai, Liqi
%A Liu, Su
%A Shen, Cheng
%A Yang, Wei
%A Du, Luojun
%A Shi, Dongxia
%A Xian, Lede
%A Tao, Xiaoming
%A Chai, Yang
%A Li, Na
%A Zhang, Guangyu
%T Wafer-scale high-κ HfO2 dielectric films with sub-5-Å equivalent oxide thickness for 2D MoS2 transistors
%J Nature Communications
%V 17
%N 1
%@ 2041-1723
%C [London]
%I Springer Nature
%M PUBDB-2026-00834
%P 1888
%D 2026
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1038/s41467-026-68584-0
%U https://bib-pubdb1.desy.de/record/646413