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@PHDTHESIS{Dresselhaus:646127,
author = {Dresselhaus, Jan Lukas},
othercontributors = {Bajt, Sasa},
title = {{C}haracterization and correction of multilayer {X}-ray
optics},
school = {University of Hamburg},
type = {Dissertation},
reportid = {PUBDB-2026-00727},
pages = {160},
year = {2025},
note = {Dissertation, University of Hamburg, 2025},
abstract = {Highest resolution X-ray microscopy requires high numerical
aperture (NA) optics ofexcellent quality which allow to
focus X-ray beams to small focal points. MultilayerLaue
lenses (MLLs) are a new type of diffractive optic with the
capability to focushard X-rays with high efficiency to
nanometer spots. However, they are currentlylimited by
wavefront aberrations caused by layer misplacements during
their fab-rication process. The determination and correction
of wavefront aberration aretherefore crucial aspects for the
development and improvement of MLLs designedto achieve the
highest possible resolutions. Wavefront characterization for
lensdevelopment cannot rely solely on access to
synchrotrons, as beamtime must beapplied for and is
therefore only available to a limited extent. For that
reason, theaim of this thesis was to determine the
requirements that have to be met in orderto enable fast and
precise wavefront characterization of MLLs using a
laboratory-based setup. This requires a dedicated table top
X-ray system and a suitable software.To determine the
optimal structure for MLLs, periodic multilayer gratings
withdifferent layer thicknesses on the scale of a few
nanometers were studied. It wasfound that high quality and
high efficiency (> 60 $\%$ at 17.5 keV and > 80 $\%$ at60
keV) periodic multilayers can be fabricated, which are
mainly limited by theinterdiffusion of the layers. The
interdiffusion depth was found to be around 0.4nm for WC/SiC
multilayer-based optics, the material pair our MLLs are
typicallymade of. Based on these findings, high NA (>0.01)
MLLs were produced for highestresolution microscopy. To
determine the wavefront aberrations of the MLLs in
alaboratory setup, a phase retrieval algorithm with low
requirements on coherenceand monochromaticity was needed.
Ptychographic X-ray speckle tracking (PXST)is an in-house
developed phase gradient reconstruction algorithm that was
foundto fulfill these requirements and was recently
augmented to incorporate machinelearning techniques, which
allow accurate phase retrieval even in noisy and
lowintensity environments. It is based on the X-ray speckle
tracking approach and can beunderstood as a generalized
Hartmann sensor that tracks sample features
betweenoverlapping images to determine local phase
gradients. It was found that due tothe robustness of the
algorithm, wavefront reconstructions are largely
accurateregardless of the measurement conditions, as long as
the lens and a suitable sampleare aligned with respect to
each other. This has reduced the time required for
theviicharacterization of MLLs from >10 hours to a few
minutes, allowing feedback on alens’ performance on the
same day it is manufactured.The wavefront error of an MLL is
a map of the relative deviation from the wavefrontof an
ideal lens, which can be related to the misplacements of its
layers, allowingsubsequent fabrication cycles to be improved
based on previous lens characteriza-tions. However, residual
aberrations remain that have to be corrected externally.
Asit becomes increasingly difficult to produce high NA MLLs
with the required preci-sion, they tend to have larger
aberrations. To correct these, a compound
refractivecorrector consisting of an array of individual
refractive elements had been proposed.For the first time,
such a design was realized based on nano-scale 3D printing
tocorrect an MLL pair for hard X-ray high-resolution
imaging, resulting in a recordfocusing of 2.9 nm ×2.8 nm at
17.5 keV.The well characterized and aberration corrected
MLLs were then used in a seriesof imaging schemes at the
PETRA III synchrotron and the European X-ray free elec-tron
laser. There, imaging techniques such as projection
holography and near-fieldptychography, which benefit from
the strong focusing of the lenses, were used withimproved
MLLs to achieve resolutions well below 10 nm. Novel imaging
techniquesthat are now possible due to high NA MLLs such as
convergent beam crystallographyhave been successfully
implemented. At high photon energies, where MLLs becomemore
efficient in contrast to other optics, the dark-field
imaging method of scanningCompton X-ray microscopy was
successfully used, allowing high-resolution imagingof
biological samples with minimal radiation dose. This method
in particular willbenefit significantly from fourth
generation synchrotrons, as their higher brightnessand
larger coherence in combination with better X-ray optics
allows for both higherresolution and faster data acquisition
times. This should enable 3D imaging ofmicroscopic samples
at high resolutions and low radiation doses.},
cin = {FS-ML / CFEL-I},
cid = {I:(DE-H253)FS-ML-20120731 / I:(DE-H253)CFEL-I-20161114},
pnm = {632 - Materials – Quantum, Complex and Functional
Materials (POF4-632) / 6G3 - PETRA III (DESY) (POF4-6G3) /
Ex-Net-0002-Phase2-3 - Advanced Imaging of Matter:
Structure, Dynamics and Control on the Atomic Scale - AIM
$(2018_Ex-Net-0002-Phase2-3)$},
pid = {G:(DE-HGF)POF4-632 / G:(DE-HGF)POF4-6G3 /
$G:(DE-HGF)2018_Ex-Net-0002-Phase2-3$},
experiment = {EXP:(DE-H253)P-P11-20150101 / EXP:(DE-H253)P-P07-20150101},
typ = {PUB:(DE-HGF)11},
urn = {urn:nbn:de:gbv:18-ediss-126347},
doi = {10.3204/PUBDB-2026-00727},
url = {https://bib-pubdb1.desy.de/record/646127},
}