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@ARTICLE{Peng:640704,
author = {Peng, Jun and Hensel, Daniel and Venugopal, Rakshith and
Rave, Lucas and Schormann, Colin and Koch, Sebastian and
Blick, Robert and Zierold, Robert},
title = {{ALD}‐{A}ssisted {VO}$_2$ for {M}emristor {A}pplication},
journal = {Advanced engineering materials},
volume = {27},
number = {10},
issn = {1438-1656},
address = {Weinheim},
publisher = {Wiley-VCH Verl.},
reportid = {PUBDB-2025-04844},
pages = {2402614},
year = {2025},
note = {Robert Blick bis einschließlich 2025 in Teilen von FS
finanziert.},
abstract = {Vanadium dioxide (VO$_2$) is a well-known candidate for
memristor applications due to its insulator-to-metal
transition (IMT) characteristics. The fabrication of
memristor devices requires highly controlled synthesis
processes concerning the material chemistry and geometry.
Atomic layer deposition (ALD) offers unique advantages for
the fabrication of hardware neural networks, such as
miniaturization, conformality, and sub-nm thickness control.
Herein, an ALD process for non-stoichiometric vanadium oxide
(VO$_x$) using tetrakis(dimethylamino)vanadium (TDMAV) and
water as precursors is presented. Subsequently, a
tailor-made annealing process converts VO$_x$ into VO$_2$,
which exhibits an IMT of about three orders of magnitude at
around 70 °C, rendering it a promising memristor
material. VO$_2$ thin film and Si–Al$_2$O$_3$/VO$_2$
core/shell memristors are fabricated and analyzed, both of
which exhibited I–V hysteresis loops, indicating their
suitability for memristor applications in both 2D and 3D
morphologies. Additionally, these memristors are sensitive
to the operation temperature, with the hysteresis loops
narrowing and shifting toward lower voltages as temperature
increases, eventually disappearing beyond VO$_2$'s intrinsic
phase transition temperature. This study highlights the
viability of ALD-assisted VO$_2$ for memristor applications
and demonstrates its potential for advancing the
three-dimensionalization of neuromorphic chips.},
cin = {FS-PS},
ddc = {660},
cid = {I:(DE-H253)FS-PS-20131107},
pnm = {632 - Materials – Quantum, Complex and Functional
Materials (POF4-632) / DFG project G:(GEPRIS)192346071 - SFB
986: Maßgeschneiderte Multiskalige Materialsysteme - M3
(192346071)},
pid = {G:(DE-HGF)POF4-632 / G:(GEPRIS)192346071},
experiment = {EXP:(DE-MLZ)NOSPEC-20140101},
typ = {PUB:(DE-HGF)16},
doi = {10.1002/adem.202402614},
url = {https://bib-pubdb1.desy.de/record/640704},
}