TY  - JOUR
AU  - Deyu, Getnet Kacha
AU  - Parikh, Trupen
AU  - Wenskat, Marc
AU  - Gonzalez Diaz-Palacio, Isabel
AU  - Blick, Robert H.
AU  - Zierold, Robert
AU  - Hillert, Wolfgang
TI  - Reducing the Thermal Effects during Coating of Superconducting Radio-Frequency Cavities: A Case Study for Atomic Layer Deposition of Alumina with a Combined Numerical and Experimental Approach
JO  - Chemistry of materials
VL  - 36
IS  - 6
SN  - 0897-4756
CY  - Washington, DC
PB  - American Chemical Society
M1  - PUBDB-2024-07526
SP  - 2846-2856
PY  - 2024
AB  - Coating the inner surface of superconducting radio frequency (SRF) cavities is one of the strategies to push ultimate limits in next generation accelerators. One of the potential coating techniques for such intricate and large volume structures is atomic layer deposition (ALD), as it offers full and uniform layer coverage. In order to predict the process parameters for coating SRF cavities on the large substrates with ALD, we simulate the ALD of alumina (Al<sub>2</sub>O<sub>3</sub>) on the ANSYS Fluent 19.1 commercial package by solving vapor transport and chemistry equations. The computational domain in the numerical model is based on the homemade ALD setup for thin film sample chamber and a 1.3 GHz Tesla-shaped niobium cavity. Trimethlyaluminum (TMA) and water (H<sub>2</sub>O) were used as precursors. In the simulation process for the cavity, two steps were carried out: first, the simulation of precursor distribution, followed by the simulation of surface reactions. The simulations show that saturation is achieved with precursor pulses of only 50 ms after 1.05 s for TMA and 750 ms for H<sub>2</sub>O, obviating the necessity for prolonged exposure times. Furthermore, the resulting predicted growth per cycle of these process times of ≈1.22 Å for Al2O3 was experimentally validated, affirming the credibility of our simulations. Experimental findings also showcased a remarkable 66.2
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001180297700001
DO  - DOI:10.1021/acs.chemmater.3c03173
UR  - https://bib-pubdb1.desy.de/record/619278
ER  -