TY  - CONF
AU  - Voige, Marco
AU  - Deyu, Getnet Kacha
AU  - Zierold, Robert
AU  - Wenskat, Marc
AU  - Hillert, Wolfgang
TI  - Atomic layer deposition of tantalum oxide- a new material for coating cavities
M1  - PUBDB-2024-07493
PY  - 2024
T2  - 11th International Workshop on Thin Films and New Ideas for Pushing the Limits of RF Superconductivity
CY  - 16 Sep 2024 - 20 Sep 2024, Saclay (France)
Y2  - 16 Sep 2024 - 20 Sep 2024
M2  - Saclay, France
LB  - PUB:(DE-HGF)6
UR  - https://bib-pubdb1.desy.de/record/619235
ER  -