%0 Conference Paper
%A Voige, Marco
%A Deyu, Getnet Kacha
%A Zierold, Robert
%A Wenskat, Marc
%A Hillert, Wolfgang
%T Atomic layer deposition of tantalum oxide- a new material for coating cavities
%M PUBDB-2024-07493
%D 2024
%B 11th International Workshop on Thin Films and New Ideas for Pushing the Limits of RF Superconductivity
%C 16 Sep 2024 - 20 Sep 2024, Saclay (France)
Y2 16 Sep 2024 - 20 Sep 2024
M2 Saclay, France
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://bib-pubdb1.desy.de/record/619235