TY  - CONF
AU  - Schneller, Lukas
AU  - Henn, Manuel
AU  - Spurk, Christoph
AU  - Hummel, Marc
AU  - Olowinsky, Alexander
AU  - Beckmann, Felix
AU  - Moosmann, Julian
AU  - Holder, Daniel
AU  - Hagenlocher, Christian
AU  - Graf, Thomas
TI  - Synchrotron X-ray imaging of the formation of geometry deviations during percussion laser drilling with ultrashort pulses
JO  - Journal of Laser Micro/Nanoengineering
VL  - 19
IS  - 2
SN  - 1880-0688
CY  - Osaka
PB  - [Verlag nicht ermittelbar]
M1  - PUBDB-2024-06090
SP  - 151 - 154
PY  - 2024
AB  - The main objective of this work is to provide a basic understanding of the mechanisms and locations of defect formation during percussion laser drilling of microholes using ultrashort pulses.Through the application of high-speed synchrotron X-ray imaging, we have been able to observe the dynamic formation and evolution of these defects in real-time. Our findings indicate that the initial deviations in the borehole geometry are highly dependent on the applied laser fluence. Specifically, while higher peak fluences facilitate deeper drilling, there exists a critical threshold beyond which the position of these deviations begins to decrease as the fluence increases. This behavior can be partially predicted within a certain fluence range using an existing theoretical model, which our experimental observations have tested and validated. Consequently, this research not only advances our understanding of defect formation in laser drilling but also provides a predictive framework for optimizing drilling parameters to minimize defects and enhance borehole quality.
T2  - The 25th International Symposium On Laser Precision Microfabrication
CY  - 11 Jun 2024 - 14 Jun 2024, San Sebastián (Spain)
Y2  - 11 Jun 2024 - 14 Jun 2024
M2  - San Sebastián, Spain
LB  - PUB:(DE-HGF)16 ; PUB:(DE-HGF)8
UR  - <Go to ISI:>//WOS:001324468000010
DO  - DOI:10.2961/jlmn.2024.02.2010
UR  - https://bib-pubdb1.desy.de/record/615332
ER  -