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@ARTICLE{Khaliq:614020,
      author       = {Khaliq, Ahmar and Wittwer, Felix and Pyrlik, Niklas and
                      Fevola, Giovanni and Patjens, Svenja and Barp, Jackson and
                      Falkenberg, Gero and Hampel, Sven and Stückelberger,
                      Michael and Garrevoet, Jan and Brueckner, Dennis Bjoern and
                      Modregger, Peter},
      title        = {{M}easurements of dislocations in 4{H}-{S}i{C} with rocking
                      curve imaging},
      reportid     = {PUBDB-2024-05721, arXiv:2409.00200},
      year         = {2024},
      abstract     = {4H Silicon Carbide (4H-SiC) combines many attractive
                      properties such as a high carrier mobility, a wide bandgap,
                      and a high thermal conductivity, making it an ideal
                      candidate for high-power electronic devices. However, a
                      primary challenge in utilizing 4H-SiC is the presence of
                      defects in epitaxial layers, which can significantly degrade
                      device performance. In this study, we have used X-ray
                      transmission topography with a rocking curve imaging
                      technique to characterize the types and distribution of
                      defects in 4H-SiC. The derived maps from the fitted Gaussian
                      parameters were used to investigate dislocations in 4H-SiC.
                      Understanding the distribution of the dislocations provides
                      valuable insights into the overall crystal quality, which
                      can guide improvements for the fabrication processes.},
      cin          = {FS-PETRA},
      cid          = {I:(DE-H253)FS-PETRA-20140814},
      pnm          = {632 - Materials – Quantum, Complex and Functional
                      Materials (POF4-632) / 6G3 - PETRA III (DESY) (POF4-6G3) /
                      FS-Proposal: I-20231255 (I-20231255)},
      pid          = {G:(DE-HGF)POF4-632 / G:(DE-HGF)POF4-6G3 /
                      G:(DE-H253)I-20231255},
      experiment   = {EXP:(DE-H253)P-P06-20150101 /
                      EXP:(DE-H253)Nanolab-03-20150101},
      typ          = {PUB:(DE-HGF)25},
      eprint       = {2409.00200},
      howpublished = {arXiv:2409.00200},
      archivePrefix = {arXiv},
      SLACcitation = {$\%\%CITATION$ = $arXiv:2409.00200;\%\%$},
      url          = {https://bib-pubdb1.desy.de/record/614020},
}