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@ARTICLE{Dacha:611504,
author = {Dacha, Preetam and Haase, Katherina and
Wrzesińska-Lashkova, Angelika and Pohl, Darius and Maletz,
Roman and Millek, Vojtech and Tahn, Alexander and
Rellinghaus, Bernd and Dornack, Christina and Vaynzof, Yana
and Hambsch, Mike and Mannsfeld, Stefan},
title = {{E}co‐{F}riendly {A}pproach to {U}ltra‐{T}hin {M}etal
{O}xides‐ {S}olution {S}heared {A}luminum {O}xide for
{H}alf‐{V}olt {O}peration of {O}rganic {F}ield‐{E}ffect
{T}ransistors},
journal = {Advanced functional materials},
volume = {34},
number = {41},
issn = {1616-301X},
address = {Weinheim},
publisher = {Wiley-VCH},
reportid = {PUBDB-2024-04941},
pages = {2315850},
year = {2024},
abstract = {Sol–gel-based solution-processed metal oxides have
emerged as a key fabrication method for applications in thin
film transistors both as a semiconducting and a dielectric
layer. Here, a low-temperature, green solvent-based,
non-toxic, and cost-effective solution shearing approach for
the fabrication of thin aluminum oxide (AlOx) dielectrics is
reported. Optimization of sustainability aspects like energy
demand, and selection of chemicals used allows to reduce the
environmental impact of the life cycle of the resulting
product already in the design phase. Using this approach,
ultra-thin, device-grade AlOx films of 7 nm are coated—the
thinnest films to be reported for any solution-fabrication
method. The metal oxide formation is achieved by both
thermal annealing and deep ultra-violet (UV) light exposure
techniques, resulting in capacitances of 750 and 600 nF
cm−2, respectively. The structural analysis using
microscopy and x-ray spectroscopy techniques confirmed the
formation of smooth, ultra-thin AlOx films. These thin films
are employed in organic field-effect transistors (OFETs)
resulting in stable, low hysteresis devices leading to high
mobilities (6.1 ± 0.9 cm2 V−1 s−1), near zero threshold
voltage (−0.14 ± 0.07 V) and a low subthreshold swing (96
± 16 mV dec−1), enabling device operation at only ±0.5 V
with a good Ion/Ioff ratio (3.7 × 105).},
cin = {DOOR ; HAS-User},
ddc = {530},
cid = {I:(DE-H253)HAS-User-20120731},
pnm = {6G3 - PETRA III (DESY) (POF4-6G3) / FS-Proposal: I-20230095
(I-20230095) / ENERGYMAPS - Revealing the electronic energy
landscape of multi-layered (opto)electronic devices
(714067)},
pid = {G:(DE-HGF)POF4-6G3 / G:(DE-H253)I-20230095 /
G:(EU-Grant)714067},
experiment = {EXP:(DE-H253)P-P08-20150101},
typ = {PUB:(DE-HGF)16},
UT = {WOS:001260594300001},
doi = {10.1002/adfm.202315850},
url = {https://bib-pubdb1.desy.de/record/611504},
}