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001     557395
005     20240927190505.0
024 7 _ |a G:(GEPRIS)151246004
|d 151246004
035 _ _ |a G:(GEPRIS)151246004
040 _ _ |a GEPRIS
|c http://gepris.its.kfa-juelich.de
150 _ _ |a NEMS/MEMS and Nanomaterial-enhanced Passive Components Compatible with Advanced Nano-CMOS for Future One-chip Tunable RF Systems
|y 2009 - 2013
371 _ _ |a Professor Dr. Thomas Geßner
450 _ _ |a DFG project G:(GEPRIS)151246004
|w d
|y 2009 - 2013
510 1 _ |a Deutsche Forschungsgemeinschaft
|0 I:(DE-588b)2007744-0
|b DFG
680 _ _ |a The main goal of this project is to develop key technologies for future one-chip tunable RF components, which will be used in future mobile wireless communication tools. The key technologies include NEMS/MEMS for tunable functions, nanomaterial-enhanced passive components in novel LTCC substrates and their wafer-level integration technology with advanced nano-CMOS.
909 C O |o oai:juser.fz-juelich.de:983238
|p authority:GRANT
|p authority
909 C O |o oai:juser.fz-juelich.de:983238
980 _ _ |a G
980 _ _ |a AUTHORITY

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