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@ARTICLE{Heinze:490849,
      author       = {Heinze, Stefan and Stark, Andreas and Hendl, Julius and
                      Leyens, Christoph},
      title        = {{I}nfluence of the {D}eposition {P}rocess on the
                      {C}r$_2$alc {P}hase {F}ormation {D}uring {H}eat {T}reatment
                      of {C}r-{A}l-{C} {T}hin {F}ilms},
      issn         = {1556-5068},
      publisher    = {Social Science Electronic Publ.},
      reportid     = {PUBDB-2022-08070},
      year         = {2022},
      abstract     = {This paper focuses on the Cr$_2$AlC phase formation during
                      annealing post-treatment, with amorphous Cr-Al-C and
                      (Cr,Al)$_2$C as initial phases in the as-deposited state.
                      The influence of the deposition process on the Cr$_2$AlC
                      formation, texture, and phase composition is investigated
                      and an in-depth discussion of the intermediate phase is
                      carried out. Cr-Al-C thin films were deposited by Direct
                      Current Magnetron Sputtering and High Power Pulsed Magnetron
                      Sputtering with the variation of the deposition temperature.
                      To investigate the microstructure, phase composition, and
                      texture, in situ synchrotron and high-temperature X-ray
                      diffraction experiments were conducted and accompanied by
                      electron microscopy. The Cr$_2$AlC formation can be
                      described as a temperature and time-dependent process with
                      one intermediate state characterized by the formation of the
                      disordered-Cr$_2$AlC phase. Disordered-Cr$_2$AlC shows a
                      similar unit cell to Cr$_2$AlC with an increased c/a ratio.
                      The ratio decreases during the phase formation resulting
                      from an ordering process. Formation temperatures depend on
                      the initial phase, with a decreased formation temperature
                      for (Cr,Al)$_2$C, and the deposition process. While the
                      (002) fiber texture of (Cr,Al)$_2$C inherited to Cr$_2$AlC,
                      Cr$_2$AlC originated from amorphous Cr-Al-C showed no
                      preferred orientation. The coatings contained Cr$_7$C$_3$ as
                      an additional phase, dependent on the deposition process and
                      initial phases.},
      cin          = {DOOR ; HAS-User / UDresden / Hereon},
      ddc          = {330},
      cid          = {I:(DE-H253)HAS-User-20120731 / I:(DE-H253)UDresden-20130903
                      / I:(DE-H253)Hereon-20210428},
      pnm          = {6G3 - PETRA III (DESY) (POF4-6G3) / FS-Proposal: I-20180296
                      (I-20180296)},
      pid          = {G:(DE-HGF)POF4-6G3 / G:(DE-H253)I-20180296},
      experiment   = {EXP:(DE-H253)P-P07-20150101},
      typ          = {PUB:(DE-HGF)25},
      doi          = {10.2139/ssrn.4168644},
      url          = {https://bib-pubdb1.desy.de/record/490849},
}