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@ARTICLE{Wiesner:485328,
author = {Wiesner, Felix and Skruszewicz, Slawomir and Rödel,
Christian and Abel, Johann Jakob and Reinhard, Julius and
Wünsche, Martin and Nathanael, Jan and Grünewald, Marco
and Hübner, Uwe and Paulus, Gerhard G. and Fuchs, Silvio},
title = {{C}haracterization of encapsulated graphene layers using
extreme ultraviolet coherence tomography},
journal = {Optics express},
volume = {30},
number = {18},
issn = {1094-4087},
address = {Washington, DC},
publisher = {Soc.},
reportid = {PUBDB-2022-06630},
pages = {32267 - 32279},
year = {2022},
abstract = {Many applications of two-dimensional materials such as
graphene require the encapsulation in bulk material. While a
variety of methods exist for the structural and functional
characterization of uncovered 2D materials, there is a need
for methods that image encapsulated 2D materials as well as
the surrounding matter. In this work, we use extreme
ultraviolet coherence tomography to image graphene flakes
buried beneath 200 nm of silicon. We show that we can
identify mono-, bi-, and trilayers of graphene and quantify
the thickness of the silicon bulk on top by measuring the
depth-resolved reflectivity. Furthermore, we estimate the
quality of the graphene interface by incorporating a model
that includes the interface roughness. These results are
verified by atomic force microscopy and prove that extreme
ultraviolet coherence tomography is a suitable tool for
imaging 2D materials embedded in bulk materials.},
cin = {FS-PS / Uni Jena},
ddc = {530},
cid = {I:(DE-H253)FS-PS-20131107 / $I:(DE-H253)Uni_Jena-20181204$},
pnm = {632 - Materials – Quantum, Complex and Functional
Materials (POF4-632)},
pid = {G:(DE-HGF)POF4-632},
experiment = {EXP:(DE-MLZ)NOSPEC-20140101},
typ = {PUB:(DE-HGF)16},
pubmed = {36242292},
UT = {WOS:000850229100061},
doi = {10.1364/OE.464378},
url = {https://bib-pubdb1.desy.de/record/485328},
}