TY  - CONF
AU  - Gonzalez Diaz-Palacio, Isabel
AU  - Blick, Robert
AU  - Hillert, Wolfgang
AU  - Jeromin, Arno
AU  - Keller, Thomas F.
AU  - Krupka, Nicolay
AU  - Stierle, Andreas
AU  - Wenskat, Marc
AU  - Zierold, Robert
TI  - PEALD SIS Studies for SRF Cavities
CY  - [Geneva]
PB  - JACoW Publishing, Geneva, Switzerland
M1  - PUBDB-2022-04722
SN  - 978-3-95450-227-1
SP  - 1222-1225
PY  - 2022
N1  - Literaturangaben;
AB  - Recent technological advances and material treatments have pushed Nb SRF cavities to their maximum RF performance. A novel approach for overcoming this limitation, which takes advantage of RF field only penetrates into the superconductor at a certain distance called London penetration depth, is nano-structuring multilayers with PEALD (plasma-enhanced atomic layer deposition). SIS (superconductor-insulator-superconductor) multilayers provide magnetic screening of the bulk Nb cavity, increasing the field at which the vortex penetration starts, and higher quality factor. ALD is closely related to chemical vapor deposition and bases on sequential self-limit gas-solid surface reactions facilitating conformal coatings with sub-nm precision even on complex substrates such as the interior of a cavity. As a preliminary study for SIS SRF cavities, we investigated the AlN-NbTiN/NbN multilayers grown by PEALD. Different compositions, thicknesses, and post-deposition thermal treatments have been investigated. The characterization results of superconducting properties, elemental composition, crystallinity, and cross-section are shown in this contribution.
T2  - 13th International Particle Accelerator Conference
CY  - 12 Jun 2022 - 17 Jun 2022, Bangkok (Thailand)
Y2  - 12 Jun 2022 - 17 Jun 2022
M2  - Bangkok, Thailand
KW  - Accelerator Physics (Other)
KW  - MC7: Accelerator Technology (Other)
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
DO  - DOI:10.18429/JACOW-IPAC2022-TUPOTK013
UR  - https://bib-pubdb1.desy.de/record/482323
ER  -