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@ARTICLE{Chouprik:481023,
author = {Chouprik, Anastasia and Kirtaev, Roman and Korostylev,
Evgeny and Mikheev, Vitalii and Spiridonov, Maxim and
Negrov, Dmitrii},
title = {{N}anoscale {D}oping and {I}ts {I}mpact on the
{F}erroelectric and {P}iezoelectric {P}roperties of
{H}f$_{0.5}${Z}r$_{0.5}${O}$_2$},
journal = {Nanomaterials},
volume = {12},
number = {9},
issn = {2079-4991},
address = {Basel},
publisher = {MDPI},
reportid = {PUBDB-2022-04145},
pages = {1483},
year = {2022},
abstract = {Ferroelectric hafnium oxide thin films—the most promising
materials in microelectronics’ non-volatile
memory—exhibit both unconventional ferroelectricity and
unconventional piezoelectricity. Their exact origin remains
controversial, and the relationship between ferroelectric
and piezoelectric properties remains unclear. We introduce a
new method to investigate this issue, which consists in a
local controlled modification of the ferroelectric and
piezoelectric properties within a single
Hf$_{0.5}$Zr$_{0.5}$O$_2$ capacitor device through local
doping and a further comparative nanoscopic analysis of the
modified regions. By comparing the ferroelectric properties
of Ga-doped Hf$_{0.5}$Zr$_{0.5}$O$_2$ thin films with the
results of piezoresponse force microscopy and their
simulation, as well as with the results of in situ
synchrotron X-ray microdiffractometry, we demonstrate that,
depending on the doping concentration, ferroelectric
Hf$_{0.5}$Zr$_{0.5}$O$_2$ has either a negative or a
positive longitudinal piezoelectric coefficient, and its
maximal value is −0.3 pm/V. This is several hundreds or
thousands of times less than those of classical
ferroelectrics. These changes in piezoelectric properties
are accompanied by either improved or decreased remnant
polarization, as well as partial or complete domain
switching. We conclude that various ferroelectric and
piezoelectric properties, and the relationships between
them, can be designed for Hf$_{0.5}$Zr$_{0.5}$O$_2$ via
oxygen vacancies and mechanical-strain engineering, e.g., by
doping ferroelectric films.},
cin = {DOOR ; HAS-User},
ddc = {540},
cid = {I:(DE-H253)HAS-User-20120731},
pnm = {6G3 - PETRA III (DESY) (POF4-6G3) / FS-Proposal: I-20190533
(I-20190533)},
pid = {G:(DE-HGF)POF4-6G3 / G:(DE-H253)I-20190533},
experiment = {EXP:(DE-H253)P-P23-20150101},
typ = {PUB:(DE-HGF)16},
pubmed = {pmid:35564195},
UT = {WOS:000795416600001},
doi = {10.3390/nano12091483},
url = {https://bib-pubdb1.desy.de/record/481023},
}