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@ARTICLE{Brinker:472481,
      author       = {Brinker, Manuel and Huber, Patrick},
      title        = {{W}afer-{S}cale {E}lectroactive {N}anoporous {S}ilicon:
                      {L}arge and {F}ully {R}eversible {E}lectrochemo-{M}echanical
                      {A}ctuation in {A}queous {E}lectrolytes},
      journal      = {Advanced materials},
      volume       = {34},
      number       = {1},
      issn         = {0935-9648},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {PUBDB-2021-05034},
      pages        = {2105923},
      year         = {2021},
      abstract     = {Nanoporosity in silicon results in interface-dominated
                      mechanics, fluidics, and photonics that are often superior
                      to the ones of the bulk material. However, their active
                      control, for example, by electronic stimuli, is challenging
                      due to the absence of intrinsic piezoelectricity in the base
                      material. Here, for large-scale nanoporous silicon
                      cantilevers wetted by aqueous electrolytes,
                      electrosorption-induced mechanical stress generation of up
                      to 600 kPa that is reversible and adjustable at will by
                      potential variations of ≈1 V is shown. Laser cantilever
                      bending experiments in combination with in operando
                      voltammetry and step coulombmetry allow this large
                      electro-actuation to be traced to the concerted action of
                      100 billions of parallel nanopores per square centimeter
                      cross-section and determination of the capacitive
                      charge–stress coupling parameter upon ion adsorption and
                      desorption as well as the intimately related stress
                      actuation dynamics for perchloric and isotonic saline
                      solutions. A comparison with planar silicon surfaces reveals
                      mechanistic insights on the observed electrocapillarity
                      (Hellmann–Feynman interactions) with respect to the
                      importance of oxide formation and wall roughness on the
                      single-nanopore scale. The observation of robust
                      electrochemo-mechanical actuation in a mainstream
                      semiconductor with wafer-scale, self-organized nanoporosity
                      opens up novel opportunities for on-chip integrated stress
                      generation and actuorics at exceptionally low operation
                      voltages.},
      cin          = {TUHH / CIMMS},
      ddc          = {660},
      cid          = {I:(DE-H253)TUHH-20210331 / I:(DE-H253)CIMMS-20211022},
      pnm          = {632 - Materials – Quantum, Complex and Functional
                      Materials (POF4-632) / EHAWEDRY - Energy harvesting via
                      wetting/drying cycles with nanoporous electrodes (964524)},
      pid          = {G:(DE-HGF)POF4-632 / G:(EU-Grant)964524},
      experiment   = {EXP:(DE-MLZ)NOSPEC-20140101},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:34677879},
      UT           = {WOS:000709903400001},
      doi          = {10.1002/adma.202105923},
      url          = {https://bib-pubdb1.desy.de/record/472481},
}