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@TECHREPORT{Schlage:435024,
      author       = {Schlage, Kai and Siemens, Andrey and Willing, Svenja and
                      Adolff, Christian Frederic and Gurieva, Tatiana and
                      Bocklage, Lars and Roehlsberger, Ralf},
      title        = {{A}n apparatus for depositing material on the surface of a
                      substrate},
      reportid     = {PUBDB-2020-00520},
      year         = {2020},
      note         = {pending patent},
      cin          = {FS-PS},
      cid          = {I:(DE-H253)FS-PS-20131107},
      pnm          = {6212 - Quantum Condensed Matter: Magnetism,
                      Superconductivity (POF3-621) / HVF-0059 - Magnetosensoren
                      $(2018_HVF-0059)$},
      pid          = {G:(DE-HGF)POF3-6212 / $G:(DE-HGF)2018_HVF-0059$},
      experiment   = {EXP:(DE-MLZ)NOSPEC-20140101},
      typ          = {PUB:(DE-HGF)23},
      url          = {https://bib-pubdb1.desy.de/record/435024},
}