TY  - PAT
AU  - Schlage, Kai
AU  - Siemens, Andrey
AU  - Willing, Svenja
AU  - Adolff, Christian Frederic
AU  - Gurieva, Tatiana
AU  - Bocklage, Lars
AU  - Roehlsberger, Ralf
TI  - An apparatus for depositing material on the surface of a substrate
M1  - PUBDB-2020-00520
SN  - EP 3 587 619 A1
PY  - 2020
N1  - pending patent
LB  - PUB:(DE-HGF)23
UR  - https://bib-pubdb1.desy.de/record/435024
ER  -