%0 Patent
%A Schlage, Kai
%A Siemens, Andrey
%A Willing, Svenja
%A Adolff, Christian Frederic
%A Gurieva, Tatiana
%A Bocklage, Lars
%A Roehlsberger, Ralf
%T An apparatus for depositing material on the surface of a substrate
%M PUBDB-2020-00520
%@ EP 3 587 619 A1
%D 2020
%Z pending patent
%F PUB:(DE-HGF)23
%9 Patent
%U https://bib-pubdb1.desy.de/record/435024