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@ARTICLE{Meyer:316384,
author = {Meyer, Andreas and Franz, Norbert and Oepen, Hans Peter and
Perlich, Jan and Carbone, Dina and Metzger, Hartmut},
title = {{I}n-situ {GISAXS} of block copolymer templated formation
of magnetic nanodot arrays and their magnetic properties},
journal = {Nano research},
volume = {10},
number = {2},
issn = {1998-0000},
address = {[S.l.]},
publisher = {Tsinghua Press},
reportid = {PUBDB-2016-06571},
pages = {456–471},
year = {2016},
note = {(c) Tsinghua University Press and Springer-Verlag Berlin
Heidelberg. Post referee full text in progress (embargo 1
year from 07 November 2016).},
abstract = {The fabrication of bit-patterned media (BPM) is crucial for
new types of hard disk drives. The development of methods
for the production of BPM is progressing rapidly.
Conventional lithography reaches the limit regarding lateral
resolution, and new routes are needed. In this study, we
mainly focus on the dependence of the size and shape of
magnetic nanodots on the Ar+-ion etching duration, using
silica dots as masks. Two-dimensional (2D) arrays of
magnetic nanostructures are created using silica-filled
diblock-copolymer micelles as templates. After the
self-assembly of the micelles into 2D hexagonal arrays, the
polymer shell is removed, and the SiO2 cores are utilized to
transform the morphology into a (Co/Pt)2-multilayer via ion
etching under normal incidence. The number of preparation
steps is kept as low as possible to simplify the formation
of the nanostructure arrays. High-resolution in situ
grazing-incidence small-angle X-ray scattering (GISAXS)
investigations are performed during the Ar+-ion etching to
monitor and control the fabrication process. The in situ
investigation provides information on how the etching
conditions can be improved for further ex situ experiments.
The GISAXS patterns are compared with simulations. We
observe that the dots change in shape from cylindrical to
conical during the etching process. The magnetic behavior is
studied by utilizing the magneto-optic Kerr effect. The
Co/Pt dots exhibit different magnetic behaviors depending on
their size, interparticle distance, and etching time. They
show ferromagnetism with an easy axis of magnetization
perpendicular to the film. A systematic dependence of the
coercivity on the dot size is observed.},
cin = {DOOR / FS-DO},
ddc = {540},
cid = {I:(DE-H253)HAS-User-20120731 / I:(DE-H253)FS-DO-20120731},
pnm = {FS-Proposal: II-20080175 (II-20080175) / 6214 - Nanoscience
and Materials for Information Technology (POF3-621)},
pid = {G:(DE-H253)II-20080175 / G:(DE-HGF)POF3-6214},
experiment = {EXP:(DE-H253)D-BW4-20150101},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000394322300009},
doi = {10.1007/s12274-016-1305-5},
url = {https://bib-pubdb1.desy.de/record/316384},
}