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@ARTICLE{Fuchs:300869,
      author       = {Fuchs, Silvio and Rödel, Christian and Blinne, Alexander
                      and Zastrau, Ulf and Wünsche, Martin and Hilbert, Vinzenz
                      and Glaser, Leif and Viefhaus, Jens and Frumker, Eugene and
                      Corkum, Paul and Förster, Eckhart and Paulus, Gerhard G.},
      title        = {{N}anometer resolution optical coherence tomography using
                      broad bandwidth {XUV} and soft x-ray radiation},
      journal      = {Scientific reports},
      volume       = {6},
      issn         = {2045-2322},
      address      = {London},
      publisher    = {Nature Publishing Group},
      reportid     = {PUBDB-2016-02443},
      pages        = {20658 -},
      year         = {2016},
      abstract     = {Optical coherence tomography (OCT) is a non-invasive
                      technique for cross-sectional imaging. It is particularly
                      advantageous for applications where conventional microscopy
                      is not able to image deeper layers of samples in a
                      reasonable time, e.g. in fast moving, deeper lying
                      structures. However, at infrared and optical wavelengths,
                      which are commonly used, the axial resolution of OCT is
                      limited to about 1 μm, even if the bandwidth of the light
                      covers a wide spectral range. Here, we present extreme
                      ultraviolet coherence tomography (XCT) and thus introduce a
                      new technique for non-invasive cross-sectional imaging of
                      nanometer structures. XCT exploits the nanometerscale
                      coherence lengths corresponding to the spectral transmission
                      windows of, e.g., silicon samples. The axial resolution of
                      coherence tomography is thus improved from micrometers to a
                      few nanometers. Tomographic imaging with an axial resolution
                      better than 18 nm is demonstrated for layer-type
                      nanostructures buried in a silicon substrate. Using
                      wavelengths in the water transmission window,
                      nanometer-scale layers of platinum are retrieved with a
                      resolution better than 8 nm. XCT as a nondestructive
                      method for sub-surface tomographic imaging holds promise for
                      several applications in semiconductor metrology and imaging
                      in the water window.},
      cin          = {FS-PE / FS-SCS / DOOR / Eur.XFEL},
      ddc          = {000},
      cid          = {I:(DE-H253)FS-PE-20120731 / I:(DE-H253)FS-SCS-20131031 /
                      I:(DE-H253)HAS-User-20120731 /
                      $I:(DE-H253)Eur_XFEL-20120731$},
      pnm          = {6215 - Soft Matter, Health and Life Sciences (POF3-621) /
                      6G13 - XFEL (POF3-622)},
      pid          = {G:(DE-HGF)POF3-6215 / G:(DE-HGF)POF3-6G13},
      experiment   = {EXP:(DE-H253)D-BW3-20150101},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000369743000001},
      pubmed       = {pmid:26860894},
      doi          = {10.1038/srep20658},
      url          = {https://bib-pubdb1.desy.de/record/300869},
}