Home > Publications database > High Resolution X-Ray Diffractometric, Topographic and Reflectometric Studies of Epitaxial Layers on Porous Silicon Destined for Exfoliation > print

001     288328
005     20250730113646.0
024 7 _ |a 10.1002/xrs.2641
|2 doi
024 7 _ |a 0049-8246
|2 ISSN
024 7 _ |a 1097-4539
|2 ISSN
024 7 _ |a WOS:000360088600009
|2 WOS
024 7 _ |a openalex:W1957952421
|2 openalex
037 _ _ |a PUBDB-2015-04924
082 _ _ |a 530
100 1 _ |a Mazur, K.
|0 P:(DE-HGF)0
|b 0
|e Corresponding author
245 _ _ |a High Resolution X-Ray Diffractometric, Topographic and Reflectometric Studies of Epitaxial Layers on Porous Silicon Destined for Exfoliation
260 _ _ |a New York, NY [u.a.]
|c 2015
|b Wiley
336 7 _ |a Journal Article
|0 0
|2 EndNote
336 7 _ |a article
|2 DRIVER
336 7 _ |a Journal Article
|b journal
|m journal
|0 PUB:(DE-HGF)16
|s 1462374228_5567
|2 PUB:(DE-HGF)
336 7 _ |a ARTICLE
|2 BibTeX
500 _ _ |a (c) John Wiley & Sons, Ltd.
520 _ _ |a The presently studied substrates for manufacturing freestanding silicon epitaxial layers contained two porous layers with different porosities. The upper layers of significantly lower porosity after annealing provided smooth surfaces for deposition of epitaxial layers and the deeper layers of greater porosity enabling easier exfoliation epitaxial foil. The layered structures have been studied by means of synchrotron diffraction topography and by recording of rocking curves from small local area. The most effective method of revealing defects in freestanding exfoliated layers were Bragg-case projection topographs and ‘zebra’ pattern monochromatic beam topographs providing a map of sample curvature. The samples have been additionally examined by means of high-resolution diffractometry and reflectometry.The porous layers without epitaxial deposition provided strong narrow maximum at low angle side of the substrate maximum common for both of the porous layers. The most probable effect of the deposition of epitaxial layer is the decrease of lattice parameter in the upper layer with lower porosity, which provided the maxima in the diffraction curves located on low angle side of the substrate maximum. The topographic investigations revealed some defects in deposited epitaxial layers, connected with some irregularities of the annealed porous layer. Very characteristic common defects were large caverns, overgrown in the epitaxial process with the diameters of several tenths of micrometers and defects (possibly the overgrown submicron caverns), associated with some bundles of dislocations resolved in the topographs. In layers of large thickness, the characteristic long black and white stripes along <110> have also been observed, which most probably were stacking faults with dislocation loops.
536 _ _ |a 899 - ohne Topic (POF3-899)
|0 G:(DE-HGF)POF3-899
|c POF3-899
|f POF III
|x 0
588 _ _ |a Dataset connected to CrossRef
693 _ _ |a DORIS III
|f DORIS Beamline E2
|1 EXP:(DE-H253)DORISIII-20150101
|0 EXP:(DE-H253)D-E2-20150101
|6 EXP:(DE-H253)D-E2-20150101
|x 0
693 _ _ |a DORIS III
|f DORIS Beamline F1
|1 EXP:(DE-H253)DORISIII-20150101
|0 EXP:(DE-H253)D-F1-20150101
|6 EXP:(DE-H253)D-F1-20150101
|x 1
700 1 _ |a Wieteska, K.
|0 P:(DE-H253)PIP1007369
|b 1
700 1 _ |a Wierzchowski, W.
|0 P:(DE-H253)PIP1007939
|b 2
700 1 _ |a Sarnecki, J.
|b 3
700 1 _ |a Lipiński, D.
|b 4
700 1 _ |a Brzozowski, A.
|b 5
700 1 _ |a Paulmann, C.
|b 6
773 _ _ |a 10.1002/xrs.2641
|g Vol. 44, no. 5, p. 363 - 370
|0 PERI:(DE-600)1479999-6
|n 5
|p 363-370
|t X-ray spectrometry
|v 44
|y 2015
|x 0049-8246
856 4 _ |u https://onlinelibrary.wiley.com/doi/10.1002/xrs.2641/abstract?systemMessage=Wiley+Online+Library+will+have+be+unavailable+on+Saturday+5th+December+from+10%3A00-14%3A00+GMT+%2F+05%3A00-09%3A00+EST+%2F+18%3A00-22%3A00+SGT+for+essential+maintenance.+Apologies+for+the+inconvenience.&userIsAuthenticated=false&deniedAccessCustomisedMessage=
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/10.1002-xrs.2641.pdf
|y Restricted
|z StatID:(DE-HGF)0599
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_figures1.pdf
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_text.pdf
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/10.1002-xrs.2641.gif?subformat=icon
|x icon
|y Restricted
|z StatID:(DE-HGF)0599
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/10.1002-xrs.2641.jpg?subformat=icon-1440
|x icon-1440
|y Restricted
|z StatID:(DE-HGF)0599
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/10.1002-xrs.2641.jpg?subformat=icon-180
|x icon-180
|y Restricted
|z StatID:(DE-HGF)0599
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/10.1002-xrs.2641.jpg?subformat=icon-640
|x icon-640
|y Restricted
|z StatID:(DE-HGF)0599
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/10.1002-xrs.2641.pdf?subformat=pdfa
|x pdfa
|y Restricted
|z StatID:(DE-HGF)0599
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_figures1.gif?subformat=icon
|x icon
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_figures1.jpg?subformat=icon-1440
|x icon-1440
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_figures1.jpg?subformat=icon-180
|x icon-180
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_figures1.jpg?subformat=icon-640
|x icon-640
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_figures1.pdf?subformat=pdfa
|x pdfa
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_text.gif?subformat=icon
|x icon
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_text.jpg?subformat=icon-1440
|x icon-1440
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_text.jpg?subformat=icon-180
|x icon-180
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_text.jpg?subformat=icon-640
|x icon-640
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
856 4 _ |u https://bib-pubdb1.desy.de/record/288328/files/porart2013_n_text.pdf?subformat=pdfa
|x pdfa
|y Published on 2015-07-14. Available in OpenAccess from 2016-07-14.
|z StatID:(DE-HGF)0510
909 C O |o oai:bib-pubdb1.desy.de:288328
|p openaire
|p open_access
|p VDB
|p driver
|p dnbdelivery
910 1 _ |a Externes Institut
|0 I:(DE-HGF)0
|k >Extern
|b 1
|6 P:(DE-H253)PIP1007369
910 1 _ |a Externes Institut
|0 I:(DE-HGF)0
|k >Extern
|b 2
|6 P:(DE-H253)PIP1007939
913 1 _ |a DE-HGF
|b Programmungebundene Forschung
|l ohne Programm
|1 G:(DE-HGF)POF3-890
|0 G:(DE-HGF)POF3-899
|2 G:(DE-HGF)POF3-800
|v ohne Topic
|x 0
|4 G:(DE-HGF)POF
|3 G:(DE-HGF)POF3
914 1 _ |y 2015
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0200
|2 StatID
|b SCOPUS
915 _ _ |a Embargoed OpenAccess
|0 StatID:(DE-HGF)0530
|2 StatID
915 _ _ |a JCR
|0 StatID:(DE-HGF)0100
|2 StatID
|b X-RAY SPECTROM : 2014
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0150
|2 StatID
|b Web of Science Core Collection
915 _ _ |a WoS
|0 StatID:(DE-HGF)0110
|2 StatID
|b Science Citation Index
915 _ _ |a WoS
|0 StatID:(DE-HGF)0111
|2 StatID
|b Science Citation Index Expanded
915 _ _ |a IF < 5
|0 StatID:(DE-HGF)9900
|2 StatID
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)1150
|2 StatID
|b Current Contents - Physical, Chemical and Earth Sciences
915 _ _ |a Nationallizenz
|0 StatID:(DE-HGF)0420
|2 StatID
915 _ _ |a DBCoverage
|0 StatID:(DE-HGF)0199
|2 StatID
|b Thomson Reuters Master Journal List
920 1 _ |0 I:(DE-H253)HAS-User-20120731
|k DOOR
|l DOOR-User
|x 0
980 _ _ |a journal
980 _ _ |a VDB
980 _ _ |a UNRESTRICTED
980 _ _ |a I:(DE-H253)HAS-User-20120731
980 1 _ |a UNRESTRICTED
980 1 _ |a FullTexts

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