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@ARTICLE{Yakunin:168766,
author = {Yakunin, Sergey and Makhotkin, Igor and van de Kruijs, R.
W. E. and Chuev, Mikhail and Pashaev, E. M. and Zoethout, E.
and Louis, E. and Seregin, S. Yu. and Subbotin, I. A. and
Novikov, Dmitri and Bijkerk, F. and Kovalchuk, M. V.},
title = {{M}odel independent x-ray standing wave analysis of
periodic multilayer structures},
journal = {Journal of applied physics},
volume = {115},
number = {13},
issn = {1089-7550},
address = {Melville, NY},
publisher = {American Institute of Physics},
reportid = {DESY-2014-02652},
pages = {134303},
year = {2014},
abstract = {We present a model independent approach for the analysis of
X-ray fluorescence yield modulated by an X-ray standing wave
(XSW), that allow a fast reconstruction of the atomic
distribution function inside a sample without fitting
procedure. The approach is based on the direct regularized
solution of the system of linear equations that
characterizes the fluorescence yield. The suggested
technique was optimized for, but not limited to, the
analysis of periodic layered structures where the XSW is
formed under Bragg conditions. The developed approach was
applied to the reconstruction of the atomic distribution
function for LaN/BN multilayers with 50 periods of 43 Å
thick layers. The object is especially difficult to analyze
with traditional methods, as the estimated thickness of the
interface region between the constituent materials is
comparable to the individual layer thicknesses. However,
using the suggested technique, it was possible to
reconstruct width of the La atomic distribution showing that
the La atoms stay localized within the LaN layers and
interfaces and do not diffuse into the BN layer. The
analysis of the reconstructed profiles showed that the
positions of the center of the atomic distribution function
can be estimated with an accuracy of 1 Å.},
cin = {DOOR / FS-DO},
ddc = {530},
cid = {I:(DE-H253)HAS-User-20120731 / I:(DE-H253)FS-DO-20120731},
pnm = {DORIS Beamline E2 (POF2-54G13)},
pid = {G:(DE-H253)POF2-E2-20130405},
experiment = {EXP:(DE-H253)D-E2-20150101},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000334578200047},
doi = {10.1063/1.4869540},
url = {https://bib-pubdb1.desy.de/record/168766},
}